Back to top

Cryogenic Silicon Analysis System Spectrometer

Cryogenic Silicon Analysis System Spectrometer

Product Details:


Product Description

Cryogenic Silicon Analysis System Spectrometer

CryoSAS combines high performance FTIR spectrometers with built-in, closed-cycle cryo-cooling technique that does not require any liquid Helium. All CryoSAS components are state-of-the-art, yet utilize proven technologies to accomplish a difficult analysis in the demanding silicon production environment. CryoSAS can be operated at a high level of automation including accurate reporting of the analysis results.


Spectral range: 1500 – 280cm-1 optimized for the detection of

1. Group III and V shallow impurities in single crystal Si according to ASTM/SEMI MF1630.  For wedged samples with a thickness of approx. 3mm, the following detection limits can be reached:


  • 10ppta Phosphorus
  • 30ppta Boron


2. Substitutional Carbon according to ASTM/SEMI MF1391. This method requires a Carbon free FZ reference sample with thickness and surface properties comparable to the sample specimen. For a wedged sample with a thickness of approx. 3mm, Carbon concentrations down to 20ppba can be detected.


* Tips on getting accurate quotes. Please include product name, order quantity, usage, special requests if any in your inquiry.

Contact Details
Regd. Office Address : 507, Shahpuri Tower, C- 58, Janakpuri, New Delhi - 110058, India
Phone :+918037304424
Mr. A. Kumar (MD)
Mobile :918037304424
Factory: Didac Mension, Phase 1, Mangolpuri Industrial Area, New Delhi-83 INDIA 0091 78381 16798
Trust Stamp
Product Showcase
Quick Enquiry Form
Send Inquiry Send SMS    Call Me Free