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Dimension AFP Atomic Force Microscopes

Dimension AFP Atomic Force Microscopes
Dimension AFP Atomic Force Microscopes
Product Code : DILM175
Brand Name : DIDAC
Product Description

Dimension AFP Atomic Force Microscopes

The Dimension AFP is the world’s only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler to monitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability. Replacing costly wafer cross-sectioning, the Dimension AFP offers the highest performance available for device characterization.

Features:

  1. Combines the outstanding resolution of an atomic force microscope with the long-scan capability of an atomic force profiler
  2. Delivers the fastest throughput of any AFM or profiler
  3. Unsurpassed repeatability for in-line STI, W, Cu and CMP metrology
  4. Replaces costly, destructive cross-sectioning techniques, reducing etch measurement turnaround from days to minutes

 


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Contact Details
Regd. Office Address : 507, Shahpuri Tower, C- 58, Janakpuri, New Delhi - 110058, India
Mr. A. Kumar (MD)
Factory: Didac Mension, Phase 1, Mangolpuri Industrial Area, New Delhi-83 INDIA 0091 78381 16798
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