Cryogenic Silicon Analysis System Spectrometer
CryoSAS combines high performance FTIR spectrometers with built-in, closed-cycle cryo-cooling technique that does not require any liquid Helium. All CryoSAS components are state-of-the-art, yet utilize proven technologies to accomplish a difficult analysis in the demanding silicon production environment. CryoSAS can be operated at a high level of automation including accurate reporting of the analysis results.
Spectral range: 1500 – 280cm-1 optimized for the detection of
1. Group III and V shallow impurities in single crystal Si according to ASTM/SEMI MF1630. For wedged samples with a thickness of approx. 3mm, the following detection limits can be reached:
2. Substitutional Carbon according to ASTM/SEMI MF1391. This method requires a Carbon free FZ reference sample with thickness and surface properties comparable to the sample specimen. For a wedged sample with a thickness of approx. 3mm, Carbon concentrations down to 20ppba can be detected.