Optical Emission Spectrometer
High-precision, stable measurement is achieved by using a cutting-edge optical design that includes a high-resolution spectrometer, proven vacuum spectrometer, and light receptor condensing system. Phosphorus (P) and sulfur (S) can be accurately analyzed by reducing the effect of spectral interference. A Real-time Energy Monitoring function monitors the discharge energy consumed. Data precision is improved because bad data caused by damage or pinholes on the sample surface is cancelled out. Power consumption is significantly reduced as well.