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X Ray Metrology JVX7300LSI

X Ray Metrology JVX7300LSI
X Ray Metrology JVX7300LSI
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Product Code : DIMS011
Brand Name : DIDAC
Product Description

X-Ray Metrology JVX7300LSI

 

The JVX7300LSI was designed for in-fab R&D and in-line production process monitoring of semiconductors materials. It enables fully automated characterisation of many advanced materials in the semiconductor industry.The standard configuration is the JVX7300L, which implements Scanning HRXRD, XRR, XRD, GI-XRD and WA-XRD. Featuring fully automated source optics, the system can switch between standard XRD, High-Resolution, and X-ray reflectivity modes without user intervention, even within the same recipe batch. Full automation of the alignment, measurement, analysis and reporting of the results ensures productive and fast characterisation of thin films. To allow in-plane XRD measurements, the optional I channel can be added.

 

Application:

  • FinFET characterization, including epilayers
  • III-V on Si for future node development
  • GaN on Si for power transistors
  • High-K thickness, density and crystallinity

 


DIDAC INTERNATIONAL
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Contact Details
Regd. Office Address : 507, Shahpuri Tower, C- 58, Janakpuri, New Delhi - 110058, India
Phone :+918068096079
Mr. A. Kumar (MD)
Mobile :+918068096079
Factory: Didac Mension, Phase 1, Mangolpuri Industrial Area, New Delhi-83 INDIA 0091 78381 16798
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